CDG100D2 – INFICON Edge Capacitance Diaphragm Gauge
- Compact, saves valuable tool space
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Specifications
- Model: CDG045D2, CDG100D2
- Range: 1 … 1000 Torr
- Accuracy: 0.15% of reading
- Maximum pressure: 400 kPa / 260 kPa (1 … 500 Torr)
- Resolution: 0.003% FS
- Lowest reading: 0.01% FS
- Operating temperature: 10…50 oC
- Supply voltage: 14…30V DC or ±15 V
- Output signal: 0…10V DC
- Electrical connection: D-sub 15 chân, male
- Diagnostic port: RS232-C (pressure, status, ID)
- 2 setpoint, relay contact ≤ 30V DC / 0.5A
- Internal volume: DN 16 ISO-KF, DN 16 CF-R, OD ½ inch, 8 VCR female (optional)
- Materials exposed to vacuum: Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)
- Protection class: IP 40
Q&A
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