CDG100D – INFICON
INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. CDG100D gauges are temperature controlled at 200 °C for superior performance in demanding semiconductor and plasma processes.
ADVANTAGES
- Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
- Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Specifications
| Type | 1000 … 500 Torr / mbar | 200 … 1 Torr / mbar | 0.5 … 0.1 Torr / mbar |
| Accuracy % of reading | 0.2 | 0.2 | 0.4 |
| Pressure, max. kPa (absolute) | 400 | 260 | 130 |
| Resolution % FS | 0.003 | 0.003 | 0.003 |
| Opreating temperature (°C) | +10 … +50 | +10 … +50 | +10 … +50 |
| Storage temperature (°C) | –20 … +65 | –20 … +65 | –20 … +65 |
| Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) |
| Power consumption | |||
| During Heat up W | ≤15 | ≤15 | ≤15 |
| At operating temperature W | ≤10 | ≤10 | ≤10 |
| Output signal (analog) V(dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| Degree of protection | IP 40 | IP 40 | IP 40 |
| Standards | |||
| CE
|
EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS |
| ETL
|
UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 |
| SEMI
|
SEMI S2 | SEMI S2 | SEMI S2 |
| Electrical connection | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) |
| Weight | |||
| 1/2” tube (g) | 837 | 837 | 837 |
| DN 16 ISO KF (g) | 852 | 852 | 852 |
| DN 16 CF-R (g) | 875 | 875 | 875 |
| 8 VCR® (g) | 897 | 897 | 897 |
Q&A
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