INFICON SKY CDG025D Capacitance Diaphragm Gauge
The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination.
A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation.
The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.
ADVANTAGES
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor double protected from contamination
- One pushbutton zero function
- Wide range power supply
- 2 setpoints
- RS232 interface
- Clean room compliant
TYPICAL APPLICATIONS
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Video clip:
Specifications
|
|
CDG025D | CDG045D | CDG100D | CDG160D CDG200D |
| Mesument range (Torr) | 0.1 … 1000 | 0.1 … 1000 | 0.05 … 1000 | 1 … 1000 |
| Accuracy (% of reading) | 0.2 / 0.5 | 0.15 | 0.2 / 0.4 | 0.4 |
| Resolution (% percent FS) | 0.003 | |||
| Pressure, max (kPa) | 130 … 400 | |||
| Response time (ms) | 30 / 130 | |||
| Lowest reading (% percent FS) | 0.01 | |||
| Operation (ambient) (oC) | 5 … 50 | 10 … 40 | 10 … 50 | 10 … 50 |
| Supply voltage (V DC) | 14 … 30 | 14 … 30 hoặc ±15 | 14 … 30 hoặc ±15 | 21 … 30 hoặc ±15 |
| Output signal (analog) (V DC) | 0 … 10 | |||
| Degree of protection | IP 30 | IP 40 | IP 40 | IP 40 |
| Electrical connection | D-sub male 15 chân | |||
| Setpoint
Relay contact (VDC / A) |
2 setpoint
30 / ≤ 0.5 |
|||
| Flanges | option DN 16 ISO-KF, DN 16 CF-R, OD ½ inch, 8 VCR female | |||
| Cổng chẩn đoán | – | |||
| Protocol | – | RS232 | ||
Model:
- CDG025D, CDG025D-S: 0.1 … 1000 Torr/mbar
- CDG025D-X3: 0.1 … 1000 Torr/mbar
- CDG045D: 0.05 … 1000 Torr/mbar
- CDG100D: 0.1 … 1000 Torr/mbar
- CDG160D, CDG200D: 1 … 1000 Torr/mbar
- CDG025-C, CDG160A-C / CDG160A-CS: ceramic
Q&A
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