CDG100D2 – INFICON Edge Capacitance Diaphragm Gauge
- Compact, saves valuable tool space
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Specifications
- Model: CDG045D2, CDG100D2
- Range: 1 … 1000 Torr
- Accuracy: 0.15% of reading
- Maximum pressure: 400 kPa / 260 kPa (1 … 500 Torr)
- Resolution: 0.003% FS
- Lowest reading: 0.01% FS
- Operating temperature: 10…50 oC
- Supply voltage: 14…30V DC or ±15 V
- Output signal: 0…10V DC
- Electrical connection: D-sub 15 chân, male
- Diagnostic port: RS232-C (pressure, status, ID)
- 2 setpoint, relay contact ≤ 30V DC / 0.5A
- Internal volume: DN 16 ISO-KF, DN 16 CF-R, OD ½ inch, 8 VCR female (optional)
- Materials exposed to vacuum: Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)
- Protection class: IP 40
Q&A
Related Products
True high precision pressure measurement – Ceramic technology Full stable output – Proven by PTB Flexible communication – Various modern interfaces All functions integrated –...
The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A...
INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. CDG100D gauges are temperature controlled at 200 °C for superior...
Measuring range: 5 x 10-10 to 1000 mbar (3.8 x 10-10… 750 mbar) Accuracy: ± 15% of reading Maximum pressure: 2 bar Working temperature: 0…...