MAG470 INVERTED MAGNETRON GAUGES
The Inverted Magnetron Vacuum Gauge MAG470 is for all ultra high vacuum applications. The measurement range is from 5×10-11 mbar to 1×10-2 mbar.
ADVANTAGES
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
TYPICAL APPLICATIONS
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Specifications
| MAG470 | MAG470 extended | ||
| Measurement range (air, N2) | mbar (Torr) | 5 × 10-11 … 1 × 10-2 (3.8 × 10-11 … 7.5 × 10-3) | |
| Accuracy (N2 )1 × 10-9 … 1 × 10-3 mbar | % of reading | ≈±30% | |
| Repeatability 1 × 10-9 … 1 × 10-3 mbar | % of reading | ≈±5% | |
| Mounting orientation | any | ||
| Operation | °C | +5 … +55 | |
| Storage | °C | –40 … +65 | |
| Bake-out | °C | 2501) (extended version 2) | |
| Weight DN 40 CF-F | g | ≈950 | ≈1100 |
| Protection category | IP 40 | ||
| Standards | EN 61000-6-2, EN 61000-6-3, EN 61010-1 | ||
Q&A
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