In capital-intensive industries such as the manufacturing of semiconductors, your employees suddenly become the pit crew and must find and repair leaks very quickly. So rely on our newest solution for your leak testing team: The UL6000 Fab by INFICON is not only the most precise, durable and thus reliable testing system on the market, it also saves time throughout the testing sequence. These benefits, along with the intuitive handling and a proven helium spraying method, help your pit crew find even the smallest leaks in record time with the helium spraying method.
- Faster: HYDRO·S eliminates the water content in the signal to quickly reach a low background.
- More Flexible: If leakage prevents a vacuum from being created, Massive Mode makes it easy to detect leakage at atmospheric pressure applying the helium spraying method
- No compromises: I·ZERO 2.0 allows the helium background to be reduced without impacting the precision and reliability of the test.
- Robust: Rely on an extremely robust and low-maintenance system. Thanks to the counterflow principle, it can also withstand shock ventilation without any problems
- Greater precision: The time-saving software algorithm I·CAL reduces measurement noise to a minimum without missing details such as the slightest oscillations.
- Sensitive: The I·Check function measures the helium concentration in the environment to ensure optimum measurement conditions.
Applications:
- Semiconductor manufacturing
- Flat screen manufacturing
- Solar cell manufacturing
- Aerospace
Specifications
| Min. detectable leak rate for helium (vacuum method) | <5∙10-12 mbar∙L/s |
| Min. detectable leak rate for helium (sniffer mode) | <5∙10-8 mbar∙L/s |
| Max. inlet pressure (MASSIVE mode) | atm (~1013 mbar) |
| Type of roughing pump | roots |
| Max. pumping speed of roughing pump | 36 m³/h |
| Pumping speed @ inlet (100-1000 mbar) | 23 m³/h |
| Pumping speed @ inlet (10-100 mbar) | 26 m³/h |
| Pumping speed @ inlet (1-10 mbar) | 26 m³/h |
| Max. helium pumping speed (ULTRA mode) | >36 L/s |
| Max. helium pumping speed DN63 reduced to DN40 | ~ 30 L/s |
| Response time for 50 L | 1.4 s |
| Venting 50 L to atm. | 16 s |
| Run up time for operation | <2 min |
| Time for calibration | <30 s |
| Inlet fl ange | DN63 ISO-K |
| Detectable masses (ULTRATEST Sensor Technology) | 2,3,4 (H2, ³He, He) |
| Supply voltage | 100 to 230 V 50/60 Hz |
| Weight | 143 kg |
Order Information:
| PRODUCT | Cat. no. |
| UL6000 Fab (100 to 230 V 50/60 Hz) | 550-520 |
| ACCESSORIES | |
| DN63-ISO K Connection Kit (1x Bellow 1 m, 1x 90° elbow, 2x center ring, 2x clamp set) | 551-225 |
| DN63-ISO K/DN50 ISO KF Bellow 1 m | 551-226 |
| DN63-ISO K/DN40 ISO KF Bellow 1 m | 551-227 |
| Remote Control RC1000WL, wireless, incl. wireless transmitter | 551-015 |
| Remote Control RC1000C, wired, with 4m coiled cable | 551-010 |
| Vacuum Hose Holder for DN25 or DN40 | 551-202 |
| SL3000-3, sniffer line 3 m length | 525-001 |
| SL3000-5, sniffer line 5 m length | 525-002 |
| SL3000-10, sniffer line 10 m length | 525-003 |
| Bracket for SL3000 | 551-203 |
| SL200, Sniffer line + el. extension for UL3000/6000 | 551-210 |
| Helium bottle holder | 551-201 |
| I/O 1000 Module | 560-310 |
| BM1000 Profi bus module | 560-315 |
| BM1000 PROFINET IO module | 560-316 |
| BM1000 Ethernet/IP module | 560-318 |
| Data Cable for IO1000,BM1000, 0.5m | 560-334 |
| Data Cable 5 m | 560-335 |
| Data Cable 10 m | 560-340 |
| Data Cable 2 m | 560-332 |
| BM1000 DeviceNet module | 560-317 |
| Vacuum Hose Holder DN63 | 551-207 |

