UL6000 Fab Mobile vacuum leak detector

    In capital-intensive industries such as the manufacturing of semiconductors, your employees suddenly become the pit crew and must find and repair leaks very quickly. So rely on our newest solution for your leak testing team: The UL6000 Fab by INFICON is not only the most precise, durable and thus reliable testing system on the market, it also saves time throughout the testing sequence. These benefits, along with the intuitive handling and a proven helium spraying method, help your pit crew find even the smallest leaks in record time with the helium spraying method.

    • Faster: HYDRO·S eliminates the water content in the signal to quickly reach a low background.
    • More Flexible: If leakage prevents a vacuum from being created, Massive Mode makes it easy to detect leakage at atmospheric pressure applying the helium spraying method
    • No compromises: I·ZERO 2.0 allows the helium background to be reduced without impacting the precision and reliability of the test.
    • Robust: Rely on an extremely robust and low-maintenance system. Thanks to the counterflow principle, it can also withstand shock ventilation without any problems
    • Greater precision: The time-saving software algorithm I·CAL reduces measurement noise to a minimum without missing details such as the slightest oscillations.
    • Sensitive: The I·Check function measures the helium concentration in the environment to ensure optimum measurement conditions.

    Applications:

    • Semiconductor manufacturing
    • Flat screen manufacturing
    • Solar cell manufacturing
    • Aerospace

    Specifications

    Min. detectable leak rate for helium (vacuum method) <5∙10-12 mbar∙L/s
    Min. detectable leak rate for helium (sniffer mode) <5∙10-8 mbar∙L/s
    Max. inlet pressure (MASSIVE mode) atm (~1013 mbar)
    Type of roughing pump roots
    Max. pumping speed of roughing pump 36 m³/h
      Pumping speed @ inlet (100-1000 mbar) 23 m³/h
      Pumping speed @ inlet (10-100 mbar) 26 m³/h
      Pumping speed @ inlet (1-10 mbar) 26 m³/h
    Max. helium pumping speed (ULTRA mode) >36 L/s
    Max. helium pumping speed DN63 reduced to DN40 ~ 30 L/s
    Response time for 50 L 1.4 s
    Venting 50 L to atm. 16 s
    Run up time for operation <2 min
    Time for calibration <30 s
    Inlet fl ange DN63 ISO-K
    Detectable masses (ULTRATEST Sensor Technology) 2,3,4 (H2, ³He, He)
    Supply voltage 100 to 230 V 50/60 Hz
    Weight 143 kg

    Order Information:

    PRODUCT Cat. no.
    UL6000 Fab (100 to 230 V 50/60 Hz) 550-520
    ACCESSORIES
    DN63-ISO K Connection Kit (1x Bellow 1 m, 1x 90° elbow, 2x center ring, 2x clamp set) 551-225
    DN63-ISO K/DN50 ISO KF Bellow 1 m 551-226
    DN63-ISO K/DN40 ISO KF Bellow 1 m 551-227
    Remote Control RC1000WL, wireless, incl. wireless transmitter 551-015
    Remote Control RC1000C, wired, with 4m coiled cable 551-010
    Vacuum Hose Holder for DN25 or DN40 551-202
    SL3000-3, sniffer line 3 m length 525-001
    SL3000-5, sniffer line 5 m length 525-002
    SL3000-10, sniffer line 10 m length 525-003
    Bracket for SL3000 551-203
    SL200, Sniffer line + el. extension for UL3000/6000 551-210
    Helium bottle holder 551-201
    I/O 1000 Module 560-310
    BM1000 Profi bus module 560-315
    BM1000 PROFINET IO module 560-316
    BM1000 Ethernet/IP module 560-318
    Data Cable for IO1000,BM1000, 0.5m 560-334
    Data Cable 5 m 560-335
    Data Cable 10 m 560-340
    Data Cable 2 m 560-332
    BM1000 DeviceNet module 560-317
    Vacuum Hose Holder DN63 551-207

    Datasheet