OPG550 Augent™ Optical Plasma Vacuum Gauge – INFICON

The INFICON Augent™ Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring.

Augent™ combines two sensor technologies into one compact device for gas type monitoring from 1 × 10^-7 to 5 mbar and to measure total pressure from atmosphere down to 1 × 10^-7 mbar at the same time.

Augent™ is protected by an integrated Pirani sensor to switch off plasma above 20 mbar.

In the measurement range between 1 × 10^-7 and 5 mbar the gauge allows the detection of gases such as Oxygen, Nitrogen, Hydrogen or Argon.

ADVANTAGES

• High speed leak detection allows chamber leak test
• Increase of productivity and yield
• Long life time, no filament burns, air inrush protection
• Withstand process chemistry
• Smart algorithm for easy integration
• Compact design and small footprint
• Reliable and fast start up

TYPICAL APPLICATIONS

• Chamber leak check, faster RoR (rate of rise) test
• Leak check to find internal leaks from gas supply lines
• Real time end point control
• Gas type and concentrations control

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