BAG302 Medium to Ultra High Vacuum Gauge
BAG302 Medium to Ultra High Vacuum Gauge
The INFICON single Bayard-Alpert Hot Ion gauge BAG302 covers a wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar (1 × 10-9 to 5 × 10-2 Torr).
ADVANTAGES
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)(Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
TYPICAL APPLICATIONS
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Specifications
| Measurement range | 1.3 × 10-9 … 6.7 × 10-2 mbar
1 × 10-9 … 5 × 10-2 Torr 1.3 × 10-7 … 6.7 Pa |
| Accuracy (N2) % of reading | |
| 1.3×10-8 … 6.7×10-2 mbar | ±15 |
| 1×10-8 … 5×10-2 Torr | ±15 |
| Repeatability | ±5 |
| Operation temperature °C | 0 … +40 |
| Storage temperature °C | -40 … +70 |
| Supply voltage (Vdc) | +20 … +28 |
| Interface (digital) | RS485 |
| Filament | two Yt2O2 coated Ir |
| Filament status | display / digital output |
| Electrical connection | D-Sub, 9-pin, male for analog D-Sub, 9-pin, female for RS485 |
| Materials exposed to vacuum | Yt2O3, Ir, W, Ta, stainless steel, glass, Ni |
| Weight (g) | 270 |
Q&A
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