MPG40x ATM to Ultra-High Vacuum Gauge
The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar toatmosphere (3.8 x 10-9 Torr to atmosphere). Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.
ADVANTAGES
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
TYPICAL APPLICATIONS
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Specifications
| MPG400 FPM sealed | MPG401 metal sealed | |
| Measurement range (V) | +1.82 … +8.6 | +1.82 … +8.6 |
| Operating voltage kV | <3.3 | <3.3 |
| Operating current µA | <500 | <500 |
| Materials exposed to vacuum | stainless steel, Al2O3, FPM75, Mo, Ni, Au, W | stainless steel, Al2O3 , Ag, Cu, Sn, Mo, Ni, Au, W |
| Protection | IP 40 | |
| Weight (g) | ||
| DN 25 ISO-KF | ~700 | ~730 |
| DN 40 ISO-KF | ~720 | ~750 |
| DN 40 CF-F | ~980 | ~1010 |
Q&A
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