INFICON BPG402 Bayard-Alpert Pirani Vacuum Gauge
INFICON BPG402 Bayard-Alpert Pirani Vacuum Gauge
- Direct replacement solution for IONIVAC ITR 90 (Leybold) probe line
- The Bayard-Alpert Pirani combined vacuum probe functions as two separate probes
- The measurement range is 5 x 10-10 mbar to atmospheric pressure
- Pirani latches help protect Bayard Alpert systems against filament burn and contamination when operating at high pressures
- The iridum coated ytrium oxide filament is long lasting
- Fieldbus display and communication options
- The Pirani probe adjusts automatically, reducing manual operation
- RoHS compatible
Application:
- Measure vacuum pressure in semiconductor processes
- Industrial plating
- General vacuum measurement and control from low to high vacuum pressure range
Clip BPG402-SD:
Specifications
- Measuring range: 5 x 10-10 to 1000 mbar (3.8 x 10-10… 750 mbar)
- Accuracy: ± 15% of reading
- Maximum pressure: 2 bar
- Working temperature: 0… 50oC
- Power supply voltage: 20… 28V DC
- Output voltage: 0… 10V DC
- Filament made of yttrium oxide coated with iridium
- Electrical connection: D-Sub 15 pins
- Flange size: optional DN 25 ISO-KF, DN 40 CF-R
Q&A
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