High Pressure Hot Ionization Pirani Gauge HPG400-INFICON
The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere).
The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.
ADVANTAGES
- HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
- The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
- User selectable hot ion emission activation between 5×10-2 and 1 mbar
- Pirani interlock protects the hot filament from premature burnout
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
TYPICAL APPLICATIONS
- Sputter applications in semiconductor manufacturing, electronics and media industry
- Industrial coating
- General vacuum measurement and control in the low to high vacuum range
Specifications
| Measurement range | 2 × 10-6 … 1000 mbar
1.5 × 10-6 … 750 Torr |
| Repeatability (N2) % of reading | |
| 10-5 … 10-1 mbar | 2 |
| 10-1 … 100 mbar | 30 |
| Accuracy 10-5 … 1 mbar | ±15 % of reading |
| Operation temperature °C | 0 … +50 |
| Storage temperature °C | -20 … +70 |
| Supply voltage (Vdc) | +20 … +28 |
| Interface (digital) | RS232C |
| Electrical connection | D-Sub, 15-pin, male |
| Degree of protection | IP30 |
| Weight (g) | 430 |
Q&A
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