FerroVac Vacuum controller – Ferrotec Temescal
Whatever electron beam evaporation system you’re currently using, you can transform it into an automated system with Ferrotec’s new FerroVac controller. The FerroVac controller integrates automated vacuum control with gauge reading functionality. When combined with the Temescal EBC Electron Beam Controller and a Temescal power supply, you can update your legacy deposition workhorse with advanced full system-level, automated control of the vacuum pump and e-beam functions. It’s like adding a process auto-pilot — start a run and walk away!
Features:
- Intuitive touch screen operation
- Expandability to manage heat and dome rotation control
- Support for offboard cryo regeneration
- Customization to any analog or digital I/O
- Auto pump/vent sequence features
- Manual operation
- Setpoints for foreline, cross over, base pressure
- Vacuum gauge calibration
- Use any log linear gauge
- Easy & comprehensive diagnostics screens
- Programmable input/output options
- Compatibility with virtually any vacuum pump
- Support for onboard & offboard cryo pump
Specifications
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