Ebeam Gun- Ferrotec Temescal
Temescal’s patented PopTop® e-beam sources offer enhanced convenience, reliability, and throughput in applications ranging from optical and microelectronic production to compound semiconductors and specialized R & D coatings. The key to these performance enhancements is Temescal’s pneumatically actuated “PopTop” crucible cover, which is raised automatically before turret rotation. The net benefit is the virtual elimination of cross-contamination.
Key Features
- Movable crucible cover, which rises before crucible is rotated
- Pneumatically driven, low-impact cover motion
- Lip of cover recessed around exposed pocket
- Raised structures on underside of cover interlock with crucible web walls
- Virtual elimination of cross-contamination
- Minimal deposition on web walls and on cover margins around exposed pocket
- Reduced risk of damage to source and turret indexer
- Removable/replaceable cover and crucible enable easy source convertibility
- Enhanced crucible cooling improves thermal stability during evaporation
- Adjustable internal and external pole piece extensions optimize beam spot control, regardless of beam position
- Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
- Power ratings: 1-10 kW (Model 2PT) and 1-12 kW (Model 3PT)
Specifications
| Dimensions | Refer to Drawings |
| Weight | Model 2PT: 44.2 lbs. (20 kg) |
| Model 3PT: 50.3 lbs. (22.8 kg) | |
| Rotation torque | 10 in.• lbs. (11.5 kg • cm) |
| Max. bakeout temp. | 302° F (150° C) |
| Max. power | Model 2PT: 10 kW |
| Model 3PT: 12 kW | |
| Acceleration voltage | 4–10 kV |
| Operating pressure | |
| Maximum | 5 x 10-4 torr (6.7 x 10-4 mbar) |
| Minimum | 1 x 10-8 torr (1.33 x 10-8 mbar) |
| Beam characteristics | |
| Beam deflection | 270° |
| Beam spot size/shape | From tight oval to diffuse oblong |
| Sweep capability | Longitudinal and lateral |
| Evaporation rate | See chart below |
| Installation requirements | |
| Input power requirements | |
| Filament current | 70 A at 12 V ac |
| Emission current | 0–1.5 A at 4–10 kV dc (10 kW max.) |
| Cooling water | |
| Max. temperature | 68° F (20° C) |
| Flow rate | 3.0 gpm (0.19 l/sec.) |
| Max. inlet pressure | 100 psi (6.89 bar) |
| Min. delta pressure | 50 psi (3.45 bar) |
| Feedthroughs | |
| High voltage | Two HV feedthroughs rated for 12 kV at 70 A |
| Octal | One octal feedthrough rated for 110 V at 3 A per lead |
| Dual pass | One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes |
| Rotary | One rotary-motion feedthrough with 1/4-in. (6.4-mm) dia. Shaft |
Q&A
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